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离子能量分布
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  ion energy distribution
     It is also shown that some parameters such as the bias frequency, bias power, bulk plasma density and electron temperature are crucial for determining the shape of the ion energy distribution in multicomponent plasmas.
     针对含多种离子成分的等离子体,本文建立了自洽的射频偏压等离子体鞘层流体动力学模型,研究了含多种离子成分的无碰撞射频偏压等离子体鞘层物理特性以及等离子体参数对轰击到基板上的离子能量分布的影响。
短句来源
     With the increase of the magnetic mirror ratio, the ion energy distribution displaces in the direction of high energy, and the width of ion energy distribution became wider.
     而随着磁镜比的增加离子能量分布却向高能方向偏移 ,并且离子能量分布宽度也将变宽 .
短句来源
     At the centre of discharge cell, the ion energy distributions displace in the direction of low energy with the increase of the magnetic density without evident variation in the ion energy distribution width.
     结果表明 ,在放电管中心处离子能量分布 ,随磁镜场强度的增加而向低能方向偏移 ,但离子能量分布宽度却没有明显的变化 ;
短句来源
     Ga+ secocdary ion yield enhancement by oxygen absorbed on the surface as well as knock-on implanted into the surface has been investigated experimentelly. The dependence of Ga+ secondary ion energy distribution on the oxygen pettal pressure has been measured at the same time.
     对吸附在表面上的氧以及反弹注入到表面内的氧引起的Ga+二次离子产额增强效应进行了实验研究,同时测量了氧分压强对Ga+二次离子能量分布的影响。
短句来源
     Experimental results have shown that the Ga+ secondary ion energy distribution is sharpened and the most probable energy shifts towards the lower energy sede for 2~3eV ther the oxygen is introduced. Hence the oxygen enhancement effect is larger for Ga+ seconfory ion in the low energy end of the energy distribution. It can be explained by bond breaking model.
     实验结果表明:注氧后Ga+二次离子能量分布变窄且最可见能量向低能端移动2~3eV,说明氧对低能Ga+二次离子的增强作用更强,这可以用断键模型来解释。
短句来源
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  ion energy distributions
     EFFECT OF THE MAGNETIC MIRROR FIELD ON THE ION ENERGY DISTRIBUTIONS IN A RADIO FREQUENCY PLASMA
     磁镜场对射频等离子体中离子能量分布的影响
短句来源
     The numerical results show that, due to the existence of multi-ion species, the sheath structure in the present work is different from those of single ion species plasmas, and multiple peaks appear in the ion energy distributions.
     得到了具有双峰结构的离子能量分布,发现等离子体参数如射频频率ω与离子等离子体频率ω_(pi)的比值β和功率对离子能量分布有很大影响; 离子能量分布的模拟结果和他人的实验结果符合得很好。
短句来源
     It is found that, as the ions move towards the cathode, the high energy portions of ion energy distributions are enhanced gradually and the small angle portions of the angle distribution increase.
     计算结果表明:离子在由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场对离子起加速和聚焦作用;
短句来源
     At the centre of discharge cell, the ion energy distributions displace in the direction of low energy with the increase of the magnetic density without evident variation in the ion energy distribution width.
     结果表明 ,在放电管中心处离子能量分布 ,随磁镜场强度的增加而向低能方向偏移 ,但离子能量分布宽度却没有明显的变化 ;
短句来源
     So the magnetic mirror parameters have significant effect on the ion energy distributions.
     由此可见 ,磁镜场参数对离子能量分布有很大影响 .
短句来源
  “离子能量分布”译为未确定词的双语例句
     It is identified that the energy distribution centre is about 20-25 eV and suits the quadrupole mass analysis.
     得出了离子能量分布的中心在20~25eV适于用四极质谱分析的结论。
短句来源
     We found a new model of this field , and we calculated the self-consistent electric field, the energy distribution and the angular distribution of the ions ,the energy distribution and the collision scattered angular distribution of the electrons using the model.
     用这个模型求出了阴极鞘层区域的自洽电场,并在求出自洽电场分布的前提下,研究了不同气体密度、不同极间电压的条件下阴极鞘层区域内的离子能量分布、角向分布、电子能量分布和电子碰撞分散角分布等微观特性。
短句来源
     Ion Density and Energy Distribution Diagnose of a Helicon Plasma
     螺旋波等离子体的密度与离子能量分布的诊断
短句来源
     By simulating the transport of argon ions in the sheath,the influence of the substrate bias on the sheath characteristics and the ion behaviors is discussed on the basis of collisional sheath,which may be of significance for the application of ECR plasmas.
     通过模拟氩离子在中性区与鞘层内的输运过程,在碰撞鞘层基础上着重分析了衬底偏压对鞘层内电势、离子能量分布和离子运动的角分布等鞘层特性和离子行为的影响。 这些结果对ECR等离子体的实际应用也有一定的参考意义
短句来源
     Collisional effects on ion energy and angular distributions incident on RF-biased electrodes
     碰撞效应对入射到射频偏压电极上离子能量分布和角度分布的影响
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  ion energy distribution
A method and results of measurements are presented of the ion energy distribution in a deuterium liner accelerated in the inverse Z-pinch, in which the plasma is accelerated electrodynamically from the liner axis.
      
It is shown that the conventional methods with AMBER, CHARMM, OPLS force fields in standard parametrization as well as partial re-parametrization give incorrect estimates of ion energy distribution in the channel.
      
Relative ion sputtering yield measurements by integration of secondary ion energy distribution using a retarding-dispersive Ion
      
Comment on relative ion sputtering yield measurements by integration of secondary ion energy distribution using a retarding-disp
      
The ion energy distribution function of the positively charged ions approaching the substrate surface has been measured using a retarding field plasma analyser probe.
      
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  ion energy distributions
The ion temperature of the plasma is evaluated from the ion energy distributions measured with an ion energy analyzer.
      
Secondary ion energy distributions were measured for different structural states and primary ions.
      
Such an extreme improvement may partially be explained by different ion energy distributions depending on their origin: matrix and analytes, working gas, residual gases.
      
The location and width of the peak in the sputtered ion energy distributions of W+ from the clean surface can be explained by a simple power dependence on energy for the ionization probability.
      
The fluence dependence and the ion energy distributions can be understood by a previously presented model involving multiple photon charge transfer plus electrostatic ejection of adions siting atop electron traps.
      
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The Constant Current Transient Technique has been used to study the kinetic behavior of mobile ions in Al-SiO2-Si structure.A surface trapping model assuming Frenkel-Poole effect has been used to analyse the energy distribution of mobile ions. Single energy model and distributed energy model have been analysed. The corresponding analytic expressions are obtained.The experimental results are consistent with those of other methods[6][7][8].

本文是工作[1]的继续。利用MOS恒流瞬态谱线研究了Al-SiO_2-Si系统中可动离子的输运过程。考虑了Poole-Frenkel效应以后,分别用单能级介面陷阱模型和连续分布能级介面陷阱模型分析了可动离子的能量分布,得到了相应的解析式。 实验结果表明,所得的可动离子的能量分布与“TSIC”法以及“FATSIC”法的实验结果一致。

The energy of the ions escaping through the loss cone of the mirror and the energy of the neutral particles produced by charge exchange process have been measured by a cylindrical low energy ion electrostatic analyzer. The energy distribution of the ions within plasma, the ion cyclotron resonance condition and the linear relation between average ion temperature and net heating, power during the ion tyclotron resonance heating process have been obtained. The average ion temperature is about 45eV when the net...

The energy of the ions escaping through the loss cone of the mirror and the energy of the neutral particles produced by charge exchange process have been measured by a cylindrical low energy ion electrostatic analyzer. The energy distribution of the ions within plasma, the ion cyclotron resonance condition and the linear relation between average ion temperature and net heating, power during the ion tyclotron resonance heating process have been obtained. The average ion temperature is about 45eV when the net heating power is 100kW. The growth rate of ion temperature is about 0.4eV per kW net heating power.

利用圆柱形低能离子静电分析器,对穿过高频加热磁镜装置逸出锥的逃逸离子和电荷交换生成的中性粒子的能量进行了测量,得到了等离子体离子的能量分布、离子回旋共振条件、以及发生离子回族共振时等离子体离子平均温度与加热净功率之间的线性关系。当加热净功率为100kW时,等离子体离子平均温度约为45eV。每1kW加热净功率大约提高离子温度0.4eV。

This paper studies the mechanism of generating the sputtered neutral signal by using post ionization process in RF glow discharge ion source. The experiment on probe detection of discharge plasma and the energy analysis of extracted ions are diseribed. It is identified that the energy distribution centre is about 20-25 eV and suits the quadrupole mass analysis.

本文对射频辉光放电离子源用后电离方式产生中性粒子信号的机理进行了研究。介绍了放电等离子体的探针诊断与引出离子流的能量分析实验。得出了离子能量分布的中心在20~25eV适于用四极质谱分析的结论。

 
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