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微齿轮
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  micro gear
     Model of Micro Gear Mesh and Computation of Parameter in Micro3 K-2 Planetary Gear Reducer
     微3K-2型行星齿轮减速器中微齿轮啮合模型和参数计算
短句来源
     ComPuter Aided Graphical Design of X Ray Mask in LIGA Fabrication of Micro gear
     LIGA技术制造微齿轮中X光掩模板图形的CAD设计
短句来源
     In this paper,based on LIGA technology, detailed investigations of design and fabrication of micro 3K-2 type planetary gear reducer, such as design of the micro reducer, CAD of the micro gear mask, X-ray photolithography, micro electroforming, micro molding, have been performed.
     详细讨论了基于该技术的微行星齿轮减速器的设计和制造 ,包括微行星齿轮减速器的设计、微齿轮 X射线掩模板的 CAD技术、X射线深层光刻、微齿轮的微电铸和微复制 ,以及微行星齿轮减速器的微装配。
短句来源
     secondly, plate pattern is made up using three-layers photoresist technology, so that the thickness of the micro gear can be over 40 μm and the aspect ratio is 2;
     其次,结合三层光刻胶光刻工艺制作镀模,制作的微齿轮结构厚度能达到40μm,深宽比为2;
短句来源
     In the article, a new quisa-LIGA technology based on LIGA is discussed by giving an example of the fabrication of a drivable micro gear.
     本文以一种微齿轮传动结构的制作过程为例,探索了一种基于LIGA 的新型准LIGA 技术。
短句来源
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  micro-gear
     The result of Scanning Electron Microscopy(SEM) measurement show that the micro-gear with smooth surface and vertical sidewall ,the thickness and diameter of the micro-gear is 270 μm and 12 μm.
     扫描电子显微镜(SEM)测量表明,所得的微齿轮直径270μm左右,厚度12μm左右,表面平整,侧壁陡直.
短句来源
     Micro-gear is an important micro-part and has great potential application in mechanical transmission.
     微齿轮是一种重要的微机械传动构件,具有重要的应用价值。
短句来源
  micro-gears
     Using the silicon anisotropic etching tech-nique, we fabricate silicon micro-gears with depth of 24. 7 μm.
     用这里获得的SF_6/CCl_2F_2各向异性刻蚀硅的工艺,已刻蚀出厚度为24.7μm的硅微齿轮.
短句来源
     In this paper, the difference between the conventional gears and micro-gears are discussed, and the main issues in the micro-gears research are also concluded.
     为此,分析了微齿轮与普通齿轮的一些区别,并提出了微齿轮基础研究中的主要问题和应该注意的关键问题。
短句来源
  “微齿轮”译为未确定词的双语例句
     Study on simulation theories and mathematic model of standard 2K-H microgear system
     标准2K-H微齿轮系统数学建模与运动学仿真理论分析
短句来源
     The exeperiment indicates that the opening distance and the gripping force reach 280μm and 0.1N respectively. The desigh of micro-gripper is verified by gripping of gears with the diameter of 200μm 2000μm and the micro planetary reducer iS assembled.
     实验表明:夹持器张合量达280μm,夹持力达0.1N,可精确操作200- 2000μm的微齿轮,实现了微行星齿轮减速器的装配。
短句来源
     Process Study of Fabricating Bi-layer Micro Gears through UV-LIGA Technique
     UV-LIGA双层微齿轮加工工艺研究
短句来源
     Utilizing these gears,a micro reducer whose modulus, outer diameter and velocity ratio are 0 03, 2mm, 44 2 respectively, has been assembled and applied in φ=2mm micro electro magnetic motor successfully.
     用这些微齿轮装配成了一台模数为 0 .0 3 mm、减速比为 44.2、最大外径为 2 mm的微行星齿轮减速器 ,并将其成功地应用在直径为 2 mm的电磁型微马达上。
短句来源
     Research on the Computational Method of Van Der Waals Force Between Contacting Faces in Microgear Train
     微齿轮系统中接触齿廓间范德华力计算方法研究
短句来源
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  micro gear
A micro gear and grooves on pure copper piece were bio-machined.
      
The capacity of this process has been demonstrated by the manufacture of micro gear systems.
      
Sliding simulation for adhesion problems in micro gear trains based on an atomistic simplified model
      
In this paper, molecular dynamics simulations of adhesion problems in micro gear train are proposed.
      
Based on analysis of sliding friction and the transmitting characteristics of micro gear train, a model is established by utilizing the Morse potential function.
      
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  micro-gear
The liquid is recycled using a micro-gear pump from HNP Mikrosysteme to accumulate the solids loading.
      


Deep reactive ion etching techniques for silicon micromachining, with SF6/C2ClF5, SF6/CCl2F2, SF6/CCl2F2/O2 gas mixture on a parralell plate etcher, are report-ed in this paper. While Cr is used as the mask of silicon, SF6/C2ClF5 etches siliconisotropically; but the etch rates are rather high (>0. 5 μm/min). Also using Cr film asthe mask, SF6/CCl2F2 and SF6/CCl2F2/O2 can etch silicon anisotropically, and the etchrates are related with radio frequency power densities, chamber pressures. Then theanisotropic mechanism...

Deep reactive ion etching techniques for silicon micromachining, with SF6/C2ClF5, SF6/CCl2F2, SF6/CCl2F2/O2 gas mixture on a parralell plate etcher, are report-ed in this paper. While Cr is used as the mask of silicon, SF6/C2ClF5 etches siliconisotropically; but the etch rates are rather high (>0. 5 μm/min). Also using Cr film asthe mask, SF6/CCl2F2 and SF6/CCl2F2/O2 can etch silicon anisotropically, and the etchrates are related with radio frequency power densities, chamber pressures. Then theanisotropic mechanism is discussed here. Using the silicon anisotropic etching tech-nique, we fabricate silicon micro-gears with depth of 24. 7 μm.

利用SF_6/_C_2ClF_5,SF_6/CCl_2F_2,SF_6/CCL_2F_2/O_2等氟氯族混合气体,在普通的平板型反应离子刻蚀系统上,进行了反应离子深刻蚀硅的研究.在Cr膜的掩护下,SF_6/C_2ClF_5刻蚀硅的速率最快,但刻蚀的方向性差;SF_6/CCl_2F_2和SF_6/CCl_2F_2/O_2都可获得各向异性的刻蚀工艺,刻蚀速率在200~500nm/min之间.实验中,还测定了SF_6/CCl_2F_2刻蚀硅的速率与射频功率密度和反应室气体压强的关系曲线;并讨论了各向异性的物理机制和O_2.的加入对刻蚀结果的影响.用这里获得的SF_6/CCl_2F_2各向异性刻蚀硅的工艺,已刻蚀出厚度为24.7μm的硅微齿轮.

The microgears with module of 0 06 have been machined by micro EDM technique. The principle , method and key technologies of the technique are also described.

本文通过用微细电火花(EDM)方法加工模数为0.06的微齿轮研究,阐述了微细EDM方法加工微齿轮的原理、方法和关键技术。

Some formulae aboutmicro gear mesh model and micro gear parameter computation in micro re- duction were propounded. Based on these formulae,some examples of micro reducers,whose modulus are 0 .0 8,0 .0 6,0 .0 4 ,0 .0 3,whose sun gear teeth,planetary gear teeth,fix inner gear teeth and inner wheel gear teeth are 1 5 ,1 1 ,36and 39respectively,were computed and compared. Based on it,a micro planetary gear reducer whose modulus is0 .0 6was researched and manufactured.

提出了微3K-2型行星齿轮减速器设计中,模数小于0.08的微齿轮传动啮合模型和参数计算公式.并对模数分别为0.08、0.06、0.04、0.03,太阳轮、行星轮、固定内齿轮、旋转内齿轮齿数分别为15、11、36、39的微齿轮进行了参数计算和比较.根据计算结果完成了模数0.06的微3K-2型行星齿轮减速器的研制.该减速器与电磁型微电动机相配,可降低微电动机的转速、减小微电动机的惯量、增大微电动机的输出力矩

 
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