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In the present paper, the common principle and the basic method of the technique of measuring thickness using a scanning laser beam are described. The elements which have an effect on the accuracy of the measurement are analyzed in principle, and therefore, the significance of the signal processing is dealt with. Especially, a scheme of the signal processing known as double frequency pulse-counting technique is presented, so that the measurement of the materials having irregular surface properties becomes feasible... In the present paper, the common principle and the basic method of the technique of measuring thickness using a scanning laser beam are described. The elements which have an effect on the accuracy of the measurement are analyzed in principle, and therefore, the significance of the signal processing is dealt with. Especially, a scheme of the signal processing known as double frequency pulse-counting technique is presented, so that the measurement of the materials having irregular surface properties becomes feasible and the required accuracy in industrial metrology is reached. Finally, a prototype of measuring thickness instrument which has been used in the production of a rubber factory is reported with its experimental results. 本文叙述了激光扫描测厚技术的一般原理和基本方法,对影响测量精度的主要因素进行了原则的分析,论证了信号处理的重要意义;提出了双频脉冲计数法信号处理方案,使激光测厚仪对非规整表面材料的测量达到工业生产的使用要求;介绍了激光测厚仪的现场使用情况和实验结果。 The dimensional measurement using CCD imaging sensors isusually implemented by the method of photoelectrical pulse number counting,in which a photoelectrical pulse represents a span of photoelectrical cell inCCD imaging sensor. The span is approximately equal to the resolu tion errorof dimensional measurement. In many cases of highly precise measurement, this kind of resolution error limited the application of this technology. In or-der to surmount the difficulty, D. G. Purll has suggested that the pulse signalbe... The dimensional measurement using CCD imaging sensors isusually implemented by the method of photoelectrical pulse number counting,in which a photoelectrical pulse represents a span of photoelectrical cell inCCD imaging sensor. The span is approximately equal to the resolu tion errorof dimensional measurement. In many cases of highly precise measurement, this kind of resolution error limited the application of this technology. In or-der to surmount the difficulty, D. G. Purll has suggested that the pulse signalbe demodulated to reform the continue photo signal by which the characteristicedge point of a measured object might be determined. This paper has theoreti-cally analysed the method of demodulation measurement. At first. it analys-ed the engineering realization of the ideal demodulation network and resultedin that (1) adjusting the lens parameter D/_2 could meet the band widthrequirement of photo signal; (2) in the specified condition, ideal demodulationnetwork could be replaced by an ideal low-pass filter; (3) the linear phasecharacter of this filter is very important to demodulate the pulse signal exac-tly; and (4) the definite length of CCD array merely affects the measure-ment range, whereas does not affect the demodulation precision. And then, itproved that the characteristic edge point is located at the point of the max-imum differential value of the continue photo signal. According to these analy-ses, the signal processing method has been, for the first, put forward. Arealizcd, experimental measurement system using this demodulation methoddemonstrated that this method could raise the resolution about ten times.Through the showed measurement result, it can be seen that because of the riseof resolution, systematic error appeared as an approximate straight line.This feature will be useful to compensate the systematic error by microproce-ssor. In this way, the demodulation measurement technique can reach theprecision level that in the total measurement range equal to the length of CCDarray, the measurement error can be under 2μm. CCD尺寸测量普遍采用脉冲计数法,即一个脉冲代表一个光敏元间距,为了提高测量的固有分辨力,Purll,D.C.提出了解调测量的设想。本文对此方法进行了理论分析并提出了工程实现方法,最后介绍了采用这一方法的实验结果。 Some problems for determining directional dose equivalent H'(0.07)by current β radiation dosimeter are discussed in the paper.The principle,method and experimental results,of main performance for determin-ing H′(0.07)by an integral pulse-amplitude method with a plasticscintillation as a detector are introduced.The differences between the methodand that of pulse counting are discussed,and relevant suggestion arepresented. 本文讨论了用现有β辐射剂量仪测量定向剂量当量H′(0.07)中存在的一些问题。介绍了用塑料闪烁体为探测器的脉冲幅度积分法测量H′(0.07)的原理、方法和主要性能的实验研究结果;讨论了其与脉冲计数法的差别,并提出了相应的建议。
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