助手标题  
全文文献 工具书 数字 学术定义 翻译助手 学术趋势 更多
查询帮助
意见反馈
   体硅 在 仪器仪表工业 分类中 的翻译结果: 查询用时:0.911秒
图标索引 在分类学科中查询
所有学科
仪器仪表工业
无线电电子学
更多类别查询

图标索引 历史查询
 

体硅
相关语句
  bulk silicon
    A Tunneling-Based Accelerometer in Bulk Silicon Processes
    体硅隧道加速度计
短句来源
    A method to make blazed silicon gratings is designed. The fabrication of (100) and (111) silicon wafer grating is performed by bulk silicon techniques. The surfaces of silicon gratings have been tested by AFM.
    设计了一种制作闪耀硅光栅的方法,利用体硅加工技术分别进行了(100)面硅片和(111)面硅片光栅的制作,对光栅的表面进行了测试。
短句来源
    2) The introduction of the principles of capacitive principle, piezoresistive principle, electrostatics principle, piezoelectric principle, stunning principle and shape memory alloy principle. The fabrication processes of the MEMS are discussed, and emphasized on the silicon surface sacrificial, bulk silicon fabrication, LIGA technology and molecule manipulating technology. The fields of the MEMS, which demand further study, are put forwarded.
    2)系统分析了MEMS的压容原理、压阻原理、静电原理、压电原理、隧道原理和形状记忆合金原理等工作原理:介绍了MEMS的平面加工工艺、体硅加工工艺、LIGA技术、准分子激光加工技术、分子操纵技术等MEMS工艺,提出了MEMS有待进一步研究的领域。
短句来源
    Results show that, the surface micro-machined structure has good thermal isolation and temperature uniformity in vacuum, excellent mechanical strength and good IC process compatibility, which make it better match the requirements of microcalorimeters than the bulk silicon fabricated structure.
    结果表明,表面加工型结构在真空中绝热性能优良、样品区温度分布较均匀,同时,它机械强度高、与IC工艺兼容性好,比体硅加工结构更符合微量热计的需要。
短句来源
    Different V-shaped electrothermal actuators are designed and fabricated using the surface and bulk silicon micromachining process respectively. And the design experience is improved.
    采用表面硅牺牲层工艺和体硅腐蚀工艺分别设计、制造了具有不同结构参数的V型电热微致动器,经过几次版图设计和流片制作,积累了两种工艺条件下硅微机构设计方面的经验。
短句来源
更多       
  silicon bulk
    Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining
    基于体硅工艺的静电致动微夹持器制作工艺分析
短句来源
    Electrostatically actuated microgripper based on silicon bulk microma chining
    体硅工艺静电致动微夹持器的试验研究
短句来源
    A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
    基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
短句来源
  “体硅”译为未确定词的双语例句
    The size of the tunneling tip is 0.02 μm×0.02 μm, and the tunneling electric current of the accelerometer is 1.14 nA—4.68 nA.
    对器件进行体硅工艺研究 ,结果为 :隧尖尺寸为 0 .0 2 μm× 0 .0 2 μm ,隧道电流为 1.14nA~ 4.68nA .
短句来源
    A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
    基于MEMS技术体硅工艺,提出一种新型大有效面积的连续变形反射镜的设计制造方法。
短句来源
    The experimental results indicate that in the cantilever-mass system formed by EPW bulk etching, there exists a tensile stress of 40~160MPa in the cantilever and mass, averagely, the residual tensile stress in the micro-cantilever is larger, reaching 100MPa.
    测试结果表明EPW体硅腐蚀形成的梁—质量块系统中梁与质量块上存在40~160MPa的张应力,微梁上的残余张应力平均达到100MPa;
短句来源
    Experimental study on characteristics of bulk micromachined micromirror
    基于体硅工艺的微反射镜的原理性实验
短句来源
    Thermal analyses of the bulk-silicon-etched-type microcolarimeters and surface-micromachined-type microcalorimeters were performed with 3D finite element analysis and experiments.
    微量热计的基本结构是带加热器和测温器的悬空膜片结构。 本文通过三维有限元模拟对体硅加工型和表面微加工型膜片结构进行热分析,并进行了实验验证。
短句来源
更多       
查询“体硅”译词为用户自定义的双语例句

    我想查看译文中含有:的双语例句
例句
为了更好的帮助您理解掌握查询词或其译词在地道英语中的实际用法,我们为您准备了出自英文原文的大量英语例句,供您参考。
  bulk silicon
The susceptibility of twinned samples is diamagnetic and close to the value of χ for bulk silicon, and the nonlinearity of the dependence χ (H) is insignificant.
      
The defect structure of a disturbed layer formed in the process of erosion cutting of bulk silicon carbide crystals has been studied experimentally.
      
When the temperature is lowered below T*, a transition to one-dimensional hopping conduction in the bulk silicon regions occurs.
      
Silicon nanopowders produced by electron-beam-induced evaporation of a bulk silicon sample in an argon atmosphere are studied by the photoluminescence technique and Raman scattering spectroscopy.
      
The cyclotron resonance spectra of holes in bulk silicon in quantizing magnetic fields are investigated in the low-temperature range.
      
更多          
  silicon bulk
The units relate to the charge transfer processes at the silicon/electrolyte interface, charge transfer though the passive film on the silicon, and the lithium diffusion into the silicon bulk.
      
The effective silicon bulk diffusivity obtained from our model is approximately equal within both portions of the enstatite reaction rim: DSi,Eneff=1.0-4.3×10-16?m2?s-1.
      
Frequency selective vibration sensors for wear state recognition have been fabricated using surface near silicon bulk micromechaning (SCREAM).
      
High precision vacuum grippers for optical fibre components are fabricated by silicon bulk micromachining.
      
The device is a modular set-up including a precision pipetting head with two integrated sensors realized in silicon bulk micromachining and a coupled piezo disk-type actuator to fulfil the force and stroke requirements for fast pipetting.
      
更多          


A novel micromachined tunneling acceleroneter is described. Using the bulk silicon fabrication technology and the silicon/glass electrostatic bonding process, a sandwich structure tunneling accelerometer was fabricated and tested. In order to reduce the low frequency noise, the feedback circuit was improved by adding oscillator and demodulator. The first prototype has a resolution of approximately 10 -6 g Hz, and can survive with at least 50 g shocking.

介绍了一种新型的微机械电子隧穿加速度计 .利用体硅微机械加工工艺和硅 /玻璃静电键合技术成功研制出了一种三明治结构的隧穿加速度计 .为了有效减小低频噪声 ,在反馈回路里加入了振荡器和解调器 .测试结果表明 ,目前样品的分辨率约为 1 0 -6 gHz ,抗冲击能力达到 5 0g .

In this paper the four sets of standard processes developed by Institute of microelectronics of Peking University are presented.In these four sets of standard process,three of them are bulk micromachining processes and one is surface sacrificial process.The key technologies used in these processes were studied systematically.Research work included:systematically study how to control the stress of polysilicon film;developed two anti stiction technologies;research of Si/Si bonding,Si/Ni/Si bonding and Si/Glass...

In this paper the four sets of standard processes developed by Institute of microelectronics of Peking University are presented.In these four sets of standard process,three of them are bulk micromachining processes and one is surface sacrificial process.The key technologies used in these processes were studied systematically.Research work included:systematically study how to control the stress of polysilicon film;developed two anti stiction technologies;research of Si/Si bonding,Si/Ni/Si bonding and Si/Glass bonding;study and optimization of high aspect ratio silicon etching;successfully reducing RIE Lag from 23% to 5%;exploiting two kinds of multi step silicon etching technologies.

本文论述了硅基MEMS标准工艺 ,其中包括三套体硅标准工艺和一套表面牺牲层标准工艺 .深入地研究了体硅工艺和表面牺牲层工艺中的关键技术 .体硅工艺主要进行了以下研究 :硅 /硅键合、硅 /镍 /硅键合、硅 /玻璃键合工艺及其优化 ;研究了高深宽比刻蚀工艺、优化了工艺条件 ;解决了高深宽比刻蚀中的Lag效应 ;开发了复合掩膜高深宽比多层硅台阶刻蚀和单一材料掩膜高深宽比多层硅台阶刻蚀工艺研究 .表面牺牲层工艺主要进行了下列研究 :多晶硅薄膜应力控制工艺 ;防粘附技术的研究与开发

Silicon is an excellent material for near-IR.So far,the history of silicon gratings has more than20years and the development of fabrication methods and applications have been im-proved a lot.Microfabrication process to made silicon gratings can be divided into bulk silicon and surface silicon technology.All these technologies are compatible with the process of microelectricity and micromachine.This review describes the fabrication of silicon gratings and the applications in different fields.

硅是一种良好的近红外材料。硅光栅的发展迄今已有20多年历史,在制作方法和应用上都有了较大的发展。硅光栅的微加工工艺可以分为体硅工艺和面硅工艺,这些微加工方法在技术上与微电子及微机械工艺可以兼容。本文介绍了硅光栅的制作及其在不同领域的应用。

 
<< 更多相关文摘    
图标索引 相关查询

 


 
CNKI小工具
在英文学术搜索中查有关体硅的内容
在知识搜索中查有关体硅的内容
在数字搜索中查有关体硅的内容
在概念知识元中查有关体硅的内容
在学术趋势中查有关体硅的内容
 
 

CNKI主页设CNKI翻译助手为主页 | 收藏CNKI翻译助手 | 广告服务 | 英文学术搜索
版权图标  2008 CNKI-中国知网
京ICP证040431号 互联网出版许可证 新出网证(京)字008号
北京市公安局海淀分局 备案号:110 1081725
版权图标 2008中国知网(cnki) 中国学术期刊(光盘版)电子杂志社