The main testing tecnologies are:controling the excitation of the micro structure,measuring the supersonic resonant frequency,testing the freguency characteristic,determining the quality factor,overcomining the blight of electro thermo effect,restraining the capacitor coupled interference.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.The main testing tecnologies are:controling the excitation of the micro structure,measuring the supersonic resonant frequency,testing the freguency characteristic,determining the quality factor,overcomining the blight of electro thermo effect,restraining the capacitor coupled interference.