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体硅mems
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  “体硅mems”译为未确定词的双语例句
     The bulk micromachined F-P MCIRDA ensures that two reflective surfaces of Fabry-Perot micro-cavity are parallel with each other and larger array device can be easily realized.
     采用硅-玻璃键合等体硅MEMS工艺制作F-P MCIRDA,既保证了法布里-泊罗微腔两个反射面相互平行,又容易实现大阵列集成。
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     The chip consisting of 50×50 moveable micromirror array is successfully fabricated by using bulk MEMS technology.
     采用体硅 MEMS技术 ,成功地制作出了 5 0×5 0的可动微镜阵列 .
短句来源
     A 50×50 F P MCIRDA has been successfully fabricated by using bulk MEMS technology.
     采用体硅MEMS工艺 ,制作出了 5 0× 5 0的Fabry Perot微腔列阵 .
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  相似匹配句对
     TECHNOLOGY OF SILICON-BASED MEMS
     MEMS技术
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     A Tunneling-Based Accelerometer in Bulk Silicon Processes
     隧道加速度计
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     K Band Silicon Monolithic MEMS Resonator
     K波段单片MEMS谐振器
短句来源
     It provides a good method for 3-D fabrication of silicon MEMS devices.
     为MEMS加工获得微机械结构提供了一个好方法。
短句来源
     Fabrication of the Bulk Silicon MOEMS Optical Switch Array
     MOEMS阵列光开关的制作
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Presents a novel uncooled optic-readable thermal imaging chip with the key part of .m×n. movable micromirror array containing micro-mirrors supported by bi-material beams.As infrared radiation applied,the bi-material beams bend and the resulting micro-mirror displacement modulates the intensity of visible light,namely,the conversion and enhancement of the light signal is completed.The chip consisting of 50×50 moveable micromirror array is successfully fabricated by using bulk MEMS technology.The influence of...

Presents a novel uncooled optic-readable thermal imaging chip with the key part of .m×n. movable micromirror array containing micro-mirrors supported by bi-material beams.As infrared radiation applied,the bi-material beams bend and the resulting micro-mirror displacement modulates the intensity of visible light,namely,the conversion and enhancement of the light signal is completed.The chip consisting of 50×50 moveable micromirror array is successfully fabricated by using bulk MEMS technology.The influence of process consistency and residual stress on the surface roughness,flatness,initial phase and thermo-mechanical sensitivity of movable micromirror are discussed.

提出了一种新颖的非致冷光读出热成像芯片的设计 ,其核心部分是一个 m× n的可动微镜阵列 ,可动微镜是由双材料弯折梁及其所支撑的微镜面组成 .在红外辐射的作用下 ,梁发生弯曲带动微镜面发生的位移变化对输出可见光的强度进行调制 ,即利用光调制原理完成光信号转换和增强 .采用体硅 MEMS技术 ,成功地制作出了 5 0×5 0的可动微镜阵列 .测试表明 :工艺一致性和残余应力对释放前后可动微镜表面粗糙度与平整度、可动微镜间初始相位以及可动微镜灵敏度的大小产生了重要影响

A novel optically readable infrared thermal imaging system that directly translates infrared image into visible image by using optically readable technology was presented. Its key part is a Fabry Perot Micro Cavity Infrared Detector Array(F P MCIRDA) based on MEMS(micro electro mechanical system) technology. Maximal thermo mechanical, opto mechanical sensitivity and temperature response of the movable micromirror are 6.47×10 -9 m/K, 1.53×10 8m -1 and 2.05×10 -4 , respectively, as theoretical...

A novel optically readable infrared thermal imaging system that directly translates infrared image into visible image by using optically readable technology was presented. Its key part is a Fabry Perot Micro Cavity Infrared Detector Array(F P MCIRDA) based on MEMS(micro electro mechanical system) technology. Maximal thermo mechanical, opto mechanical sensitivity and temperature response of the movable micromirror are 6.47×10 -9 m/K, 1.53×10 8m -1 and 2.05×10 -4 , respectively, as theoretical analysis results for bi material Au/SiNx. System noise analysis indicates that the NETD of the present design and the expected limit of the NETD are 5.1K and 58mK, respectively. A 50×50 F P MCIRDA has been successfully fabricated by using bulk MEMS technology. The initial measurement results indicate that obvious displacement of the moveable micromirrors can be observed as the infrared radiation irradiates on. The operating principle of this system is verified successfully.

提出了一种新颖的光读出红外热成像系统设计 .该系统利用光学读出技术将红外图像直接转化为可见光图像 ,其核心部件是一个基于微电子机械技术 (MEMS)制作的法布里 泊罗 (Fabry Perot)微腔红外探测器列阵 (F PMCIRDA) .通过对Au/SiNx双材料体系的理论分析 ,得出了可动微镜的最大热 机械灵敏度、机械 光灵敏度及其温度响应分别为 6 .4 7× 10 -9m/K、1.5 3× 10 8m-1、2 .0 5× 10 -4.对系统噪声分析表明 :在目前的设计中 ,系统的噪声等效温差 (NETD)为 5 .1K ,而其极限值有望达到 5 8mK .采用体硅MEMS工艺 ,制作出了 5 0× 5 0的Fabry Perot微腔列阵 .实验表明 ,在红外辐射作用下 ,可动微镜有明显的位移 ,验证了工作原理

 
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