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      热氮化     
相关语句
  thermal nitridation
     Study on Nitrogen Distribution and Nitrided Mechanism for Ultrathin Nitrided SiO_2 by Rapid Thermal Nitridation
     快速热氮化超薄SiO_2膜的氮分布和氮化机理的研究
短句来源
     The Si SiO x N y Al capacitors are fabricated on both <100>and <111> oriented Si by Rapid Thermal Nitridation (RTN)10nm SiO 2 films with a tungsten halogen lamp as radiation source heating.
     用卤素钨灯作辐射热源快速热氮化 (RTN) 10 nm Si O2 膜 ,制备了〈10 0〉和〈111〉晶向 Si衬底上的 Si- Si Ox Ny-Al电容结构 .
短句来源
     SiO_xN_y ultra thin films were grown by thermal nitridation with NiO and NH_3 used as the react gas respectively.
     本工作采用热氮化和热退火工艺,分别在N_2O和NH_3气氛中制备了薄至几个纳米的SiO_xN_y薄膜。
短句来源
     A STUDY ON THE NITROGEN DIFFUSION IN THE THERMAL NITRIDATION SiO_2 FILM WITH AUGER ES
     用俄歇能谱研究热氮化SiO_2膜中氮原子的扩散
短句来源
     By the rapid thermal nitridation (RTN) of ultra thin (10 nm) SiO 2 films, the ultra thin SiO x N y dielectric films had been prepared with tungsten halogen lamp as radiation source, and the Al/n Si/SiO x N y /Al capacitors had been fabricated too.
     用卤素钨灯作辐射热源 ,对超薄 (1 0nm )SiO2 膜进行快速热氮化 (RTN) ,制备了SiOxNy 超薄栅介质膜 ,并制作了Al/n Si/SiOxNy/Al结构电容样品 .
短句来源
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  thermal nitrided
     Electron Tunneling from the 〈100〉 and 〈111〉 Oriented Si into the Ultrathin Rapid Thermal Nitrided SiO_2 Films
     电子从〈100〉和〈111〉晶向硅隧穿超薄快速热氮化SiO_2 膜(英文)
短句来源
     BREAKDOWN CHARACTERISTICS OF RAPID THERMAL NITRIDED SiO_2 FILM OF 150 THICKNESS
     150快速热氮化SiO_2膜的击穿特性
短句来源
     Study of Trap Characteristics of Rapid Thermal Nitrided SiO_2 Film
     快速热氮化SiO_2膜陷阱特性的研究
短句来源
     Interface Nitridation Model of the Rapid Thermal Nitrided SiO_2 Film
     快速热氮化SiO_xN_y薄膜界面氮化反应模型
短句来源
     The Current Enhancement of the Tunneling Rapid Thermal Nitrided SiO_2 Films from Different Oriented Si and the Model Explaination
     电子从不同晶向Si隧穿快速热氮化SiO_2膜的电流增强及模型解释
短句来源
更多       
  rapid thermal nitridation
     Study on Nitrogen Distribution and Nitrided Mechanism for Ultrathin Nitrided SiO_2 by Rapid Thermal Nitridation
     快速热氮化超薄SiO_2膜的氮分布和氮化机理的研究
短句来源
     The Si SiO x N y Al capacitors are fabricated on both <100>and <111> oriented Si by Rapid Thermal Nitridation (RTN)10nm SiO 2 films with a tungsten halogen lamp as radiation source heating.
     用卤素钨灯作辐射热源快速热氮化 (RTN) 10 nm Si O2 膜 ,制备了〈10 0〉和〈111〉晶向 Si衬底上的 Si- Si Ox Ny-Al电容结构 .
短句来源
     By the rapid thermal nitridation (RTN) of ultra thin (10 nm) SiO 2 films, the ultra thin SiO x N y dielectric films had been prepared with tungsten halogen lamp as radiation source, and the Al/n Si/SiO x N y /Al capacitors had been fabricated too.
     用卤素钨灯作辐射热源 ,对超薄 (1 0nm )SiO2 膜进行快速热氮化 (RTN) ,制备了SiOxNy 超薄栅介质膜 ,并制作了Al/n Si/SiOxNy/Al结构电容样品 .
短句来源
     IMPROVEMENT OF GATE-OXIDE BREAKDOWN IN N-MOSFET'S USING RAPID THERMAL NITRIDATION
     快速热氮化改善n-MOSFET栅氧化层的加速击穿
短句来源
     The thermal-grow ultrathin (4 ~23nm) SiO2 was put in the rapid thermal processing (RTP) system in which there are tungstem--halogen lamps as thermal radiation sources system and the ultrathin SiO. N, films have been preparaed by rapid thermal nitridation (RTN) processing.
     将热生长的超薄(4~23nm)SiO2置于用卤素钨灯作辐射热源的快速热工艺(RTP)系统中,用快速热氮化(RTN)工艺制备了超薄的SiOxNy膜。
短句来源
更多       
  thermal nitride
     Charge Characteristics and Optical Properties of Rapid Thermal Nitride SiO_xN_y Thin Dielectric Film
     快速热氮化SiO_xN_y薄介质膜的电荷特性与光学性质
短句来源

 

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      thermal nitridation
    Influence of Gas-Thermal Nitridation of Optical Lead Silicate Glass on Its Surface Properties
    例句来源      
    It is shown that thermal nitridation of the surface layers of the glass samples at a temperature of 375-495°C and a pressure of 0.1-1.0 MPa for 1-20 h brings about the breaking of the Si-O-Si bonds and the formation of the Si-N-Si and Si-N bonds.
    例句来源      
    The degree of structural transformation in the surface layer depends on the conditions of thermal nitridation and on the chemical composition of the glass.
    例句来源      
    Rapid thermal nitridation of SiO2 (96 ?) has been performed at three different temperatures: 1150°, 1200°, and 1250°C for a nitridation time up to 150 s.
    例句来源      
    Effect of additives on the thermal nitridation of sol-gel derived silica gel
    例句来源      
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      thermal nitrided
    For enhanced radiation hardness and impurity masking capability as well as higher permittivity, rapid thermal nitrided oxides may be a potential choice deserving further evaluation.
    例句来源      
      rapid thermal nitridation
    Rapid thermal nitridation of SiO2 (96 ?) has been performed at three different temperatures: 1150°, 1200°, and 1250°C for a nitridation time up to 150 s.
    例句来源      
    The rapid thermal nitridation of titanium films used as diffusion barriers between aluminum and silicon, has a major impact on shallow junction complementary metal oxide semiconductor technologies.
    例句来源      
    During the process of rapid thermal nitridation, the dopants in the junctions undergo a redistribution and affect the electrical properties of shallow junction structures.
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