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hot-filament chemical vapour deposition
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  热丝化学气相沉积
     In this paper,the hot-filament chemical vapour deposition (HF-CVD) method to form CNT-tip is introduced. The design of the HF-CVD equipment and the application of CNT-tip in atomic force microscope are described.
     文中提出了一套制备碳纳米管探针的热丝化学气相沉积(HF-CVD)装置,叙述了HF-CVD的原理、装置以及在纳米加工上的应用。
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     Nanocrystalline diamond was synthesize d by hot-filament chemical vapour deposition. The reactive gases were the mixtu r es of CH 4, N 2 and H 2. The experimental results showed the field emissio n of nano crystalline diamond on Si, especially on Si tips was greatly improved as compar ed with polycrystalline diamond on Si.
     纳米金刚石是利用热灯丝 CVD法合成的 ,反应气体是 CH4、N2 和 H2 的混合物。 实验结果表明 Si衬底上的纳米金刚石特别是 Si尖上的金刚石与多晶金刚石相比 ,前者极大地改善了场发射性质。
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  hot-filament chemical vapour deposition
The morphology of diamond synthesized by hot-filament chemical vapour deposition
      
High-resolution transmission electron microscopy (HRTEM) was employed to study the nucleation and subsequent growth mechanism of crystalline diamond grown on copper TEM grids by the hot-filament chemical vapour deposition process.
      
Nucleation and growth mechanism of diamond during hot-filament chemical vapour deposition
      
Diamond films and particles have been deposited on a silicon substrate using a hot-filament chemical vapour deposition (CVD) method in order to study the effect of hydrogen on the behaviour of diamond nucleation.
      
Nucleation behaviour of diamond particles on silicon substrates in a hot-filament chemical vapour deposition
      
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In the present paper, the relation between diamond nucleation density and synthesis conditions is studied for the diamond thin film synthesized by hot filament chemical vapour deposition method. The experimental results show that the state of substrate surface has the most evident effects on diamond nucleation density. The substrate temperature, filament temperature and distance from filament to substrate surface also have evident effects on diamond nucleation density.

本文研究了用热灯丝化学气相沉积方法在单晶硅衬底上制备金刚石薄膜时其成核密度与制备条件的关系。结果表明,衬底表面状态、衬底温度、灯丝温度、灯丝与衬底表面间距离等对金刚石成核密度有明显的影响,且表面状态的影响最大。

The present paper reports the photoluminecence feature of diamond thin film synthesized on Mo, Si and WC substrates by hot filament Chemical Vapour Deposition method.

本文研究了用热灯丝化学气相沉积方法在硅、钼和碳化钨衬底上制备的金刚石膜的光致发光特性。

Diamond particles obtained from a mixture by the hot filament chemical vapour deposition method of methane and hydrogen were examined by scanning electron microscope.Two types of cubo-octahedron (single crystal and twinned crystal)and two types of icosahedron with different morphology were observed.Most of thetriangular crystal planes of diamond particles were depressed.One of them was the crystal ribbon grown along{111}crystal plane. A gap along a twin boundary in 20- fold twinning was directly...

Diamond particles obtained from a mixture by the hot filament chemical vapour deposition method of methane and hydrogen were examined by scanning electron microscope.Two types of cubo-octahedron (single crystal and twinned crystal)and two types of icosahedron with different morphology were observed.Most of thetriangular crystal planes of diamond particles were depressed.One of them was the crystal ribbon grown along{111}crystal plane. A gap along a twin boundary in 20- fold twinning was directly found in SEM images. It isthe first time that these are observed in diamond particles formed by the chemical vapour deposition methed. Be-sides,other types of cubo-polyhedron are also observed for the first time.

用SEM研究了CVD法生长金刚石晶粒的晶体形态,观察到了单晶立方八面体、双晶立方八面体和两种不同形态的二十面体。晶粒上的三角形晶面多为凹坑,也有{111}晶面上分层发育的晶层。在二十面体中,还直接地发现广倾角间隙。对于CVD法生长的金刚石晶粒这些都是首次观察到。此外还首次观察到其它几种立方多面体晶形。

 
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