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shear-stress sensor
相关语句
  剪应力传感器
     Fabrication and Optimization of Shear-Stress Sensor in the Microchannel
     微管道内剪应力传感器的研制与优化
短句来源
  “shear-stress sensor”译为未确定词的双语例句
     Based on micro electro mechanical system (MEMS) fabrication technology, a hot shear-stress sensor on low resistance silicon substrate was investigated in order to reduce heat loss on the substrate.
     基于微机电系统(MEMS)微加工工艺,开发了一种能够测量微管道内壁面剪应力的热式传感器,以多晶硅为热敏元件,在低阻硅衬底上形成多孔硅膜隔离硅衬底损耗.
短句来源
  相似匹配句对
     Shear flocculation
     剪切絮凝
短句来源
     SHEAR-BAND BIFURCATION
     剪切带状分叉
短句来源
     THE ADIABATIC SHEAR IN METALS
     金属的快速剪切
短句来源
     The distribution of shear stress are offered.
     文中也给出了在多种口模处的剪应力分布情况。
短句来源
     Shear stress in compression robs
     剪应力对压杆的影响
短句来源
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  shear-stress sensor
An illustrative application of this technique to an uncompensated silicon micromachined thermal shear-stress sensor operated in constant current mode is discussed.
      


Based on microelectromechanical systems(MEMS) technology, a 8×8 elements micro flexible sensor array is fabricated.A shear stress sensor is firstly manufactured on rigid Si substrate,then a silicon islands array is made on the backside of the substrate,which forms a flexible structure.The test results show that the resistance of the sensors is changed little after the bending test and the flexible structure is not broken after 3300 times bending.

利用微机电系统(MEMS)技术,制作了一种新型传感器阵列。首先,在刚性衬底上制作了一种8×8切应力传感器阵列,然后,利用硅岛阵列技术制作了一种柔性结构。试验结果表明:所制作的柔性传感器阵列经多次弯扭循环后,电阻值基本没有变化,柔性传感器在经过弯扭3300次后,传感器本身的柔性材料并没有断。

A shear stress sensor based on heat transfer principle has been developed in a micro channel.A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor.The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined.Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios.Calibration has been conducted and shear stresses versus pressure...

A shear stress sensor based on heat transfer principle has been developed in a micro channel.A silicon wafer with micro channels and a pyrex glass with hot films have been bonded to form this sensor.The temperature coefficient of resistance is measured and over heat ratios with various input powers are determined.Square waves are superimposed on a constant bias current to determine the time constants under diversiform over heat ratios.Calibration has been conducted and shear stresses versus pressure difference have been tested.

制作了一个微管道内的剪应力传感器,该传感器通过热传递的原理工作。采用硅微加工技术制作微管道,在玻璃上通过溅射方法形成钛铂合金热膜,最后将两者键合封装,形成埋置了热膜的封闭微管道。测量了热膜的电阻温度系数,确定了热膜处于不同输入功率下的过热比。对该剪应力传感器进行了方波实验,确定其工作在不同过热比下的时间常数。对传感器进行实验标定,得到不同进出口压差下,微管道内的壁面剪应力大小。

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control. This capability opens up new territory for flow control research. Based on microelectromechanical systems(MEMS) technology, a shear stress sensor and a flow actuator is fabricated. The results show...

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control. This capability opens up new territory for flow control research. Based on microelectromechanical systems(MEMS) technology, a shear stress sensor and a flow actuator is fabricated. The results show that uses this method to manufacture the micro-fluid devices is feasible. Moreover the etching and the releasing of sacrifical layer is effectively avoided.

出现于20世纪80年代后期的微机械技术可以制作出微米尺度的传感器和执行器。这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。这种性能为流动控制研究开辟了一个崭新的研究领域。利用MEMS技术设计和制作了一种传感器和一种执行器。实验证明,采用体硅腐蚀的工艺制作微流体器件是可行的,同时可以避免牺牲层腐蚀和释放的复杂工艺。

 
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