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vacuum pressure sensor
相关语句
  真空压力传感器
     Experiment study on optical fiber vacuum pressure sensor
     光纤真空压力传感器的实验研究
短句来源
     The EGR system uses the acceleration pedal position signal as a load signal and the response characteristic of EGR system is greatly improved. A vacuum pressure sensor sends vacuum control feedback signal to ECU to trim output pressure value, so that a local closed loop control of EGR rate is fulfilled.
     该EGR系统将油门位置作为负载信号,系统的响应性得到了很大提高,并首次采用真空压力传感器,向ECU提供EGR阀控制管路真空压力值反馈,对压力输出值及时修正,从而实现了EGR率的局部闭环控制。
短句来源
  真空微电子压力传感器
     Development of a Novel Microelectronic Vacuum Pressure Sensor
     一种新型真空微电子压力传感器的研制
短句来源
     A new way of using reactive ion etch and plasma etch to make sharptips for vacuum pressure sensor is presented in this paper.
     主要介绍利用反应离子腐蚀和等离子腐蚀相结合的方法制作真空微电子压力传感器中锥尖阵列。
短句来源
  相似匹配句对
     Vacuum microelectronic pressure sensor
     真空微电子压力传感器的研制
短句来源
     pressure;
     压力;
短句来源
     Vacuum Silicon Pressure Sensor
     硅压阻式真空变送器
短句来源
     Method to enhance vacuum pressure in system
     提高系统真空度的方法
短句来源
     Study on Vacuum Microelectronic Pressure Sensor
     真空微电子压力传感器的研究
短句来源
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WT5”BZ]A novel microelectronic vacuum pressure sensor is described, which is fabricated by using anisotropic etching combined with isotropic etching, as well as a special SDB technology Results from measurement and analys is show that breakdown voltage of the sensor is 100 V, the emitting current of a single silicon tip is 0 2 nA at a forward voltage of 3 V, the pressure on the sensor is linear with the output voltage at the pressure range of 25 g ~100 g, and the sensitivity...

WT5”BZ]A novel microelectronic vacuum pressure sensor is described, which is fabricated by using anisotropic etching combined with isotropic etching, as well as a special SDB technology Results from measurement and analys is show that breakdown voltage of the sensor is 100 V, the emitting current of a single silicon tip is 0 2 nA at a forward voltage of 3 V, the pressure on the sensor is linear with the output voltage at the pressure range of 25 g ~100 g, and the sensitivity of the sensor is 0 1 μA/g [WT5HZ]

采用各向异性腐蚀与各向同性腐蚀相结合的技术和特殊的硅 -硅键合技术 ,成功地研制出了一种新型真空微电子压力传感器。测试分析结果表明 ,该传感器反向击穿电压达到 1 0 0 V;在加 3V正向电压时 ,其单个锥尖发射电流为 0 .2 n A;在 2 5~ 1 0 0 g的压力范围内与输出电压呈线性关系 ,灵敏度为 0 .1μA/g

A new way of using reactive ion etch and plasma etch to make sharptips for vacuum pressure sensor is presented in this paper.In addition,to improve sensitivity and enlarge silicontips emit current, siliontip's material choose,shape optimization,virtual process fabrication are studied.The measurement results show that the emitting current of one sharp tip is 02 nA at 3 V,and the sensitivity reach 01 μA/g.

主要介绍利用反应离子腐蚀和等离子腐蚀相结合的方法制作真空微电子压力传感器中锥尖阵列。探讨合理选择制作材料,优化锥尖形状,锐化锥尖尖度,以提高传感器灵敏度,增大阴极锥尖的发射电流。测试结果表明:优化的锥尖发射电流在电压为3V时可达0.2nA,灵敏度为0.1μA/g。

In vacuum die casting process, the characteristic of cavity vacuum pressure curve was studied by theoretical calculation and experimental measurement by installing a vacuum pressure sensor inside an experimental die. The calculation was proved coincident with the experimental results. The cavity vacuum pressures of different slow injection processes were investigated. An important parameter, the vacuum time, was indicated to have obvious influence on the quality of vacuum die castings....

In vacuum die casting process, the characteristic of cavity vacuum pressure curve was studied by theoretical calculation and experimental measurement by installing a vacuum pressure sensor inside an experimental die. The calculation was proved coincident with the experimental results. The cavity vacuum pressures of different slow injection processes were investigated. An important parameter, the vacuum time, was indicated to have obvious influence on the quality of vacuum die castings. Based on the calculation of cavity vacuum pressure, a method was proposed to help adjusting the vacuum system and to optimize the slow injection phase in a vacuum die casting process to keep the cavity vacuum pressure on an appropriate level.

针对真空压铸中型腔真空压力的下降规律进行了理论计算和试验研究。针对具体的真空系统进行了型腔排气理论曲线和实测曲线的对比,验证了这种计算方法的可行性,指出了真空压铸为了达到理想的型腔真空压力对于低速工艺选择的限制要求,并提出了一种通过计算理论排气时间来对真空系统设计和低速工艺制定进行优化的方法。

 
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