Based on the summary of factors affecting SIMS depth resolution, the analytical expression of depth resolution function is introduced. Its physical sense, especially the definition of resolution parameters, is discussed accordingly.
Resolution function and optimal parameters for a polarized fourier spectrometer of finite aperture
After a general introduction to the technique, the necessity to use sub-keV primary ion impact energies is explained on the basis of the depth resolution function, which describes the profile distortion accompanying sputtering.
The effect of an incorrect resolution function may be reduced by excluding the peak regions of the spectra from the analysis.
Simulating the entire experiment is an attractive alternative to the usual method of convoluting the model cross section with the resolution function, especially if the resolution function is nontrivial.
The calculated inelastic resolution function for three different instrumental setups is compared to the experimentally determined resolution function.