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hot filament cvd
相关语句
  热丝cvd
     An infrared generator in the hot- filament CVD chamber was designed with the main wavelength 3.5μ m, which was right situated in the stretch vibration absorption peak of the C- H bond in methane molecule and H- H bond in hydrogen molecule.
     在传统热丝 CVD腔中设置一套红外线发 生器,中心波长 3.5μ m,处于氢与甲烷分子拉伸振动吸收峰位置。
短句来源
     An improved hot- filament CVD system was developed to deposit diamond films.
     采用一种改进的热丝 CVD系统沉积金刚石膜。
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  相似匹配句对
     HOT
     热报!
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     Hot Movies
     五月热片(英文)
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     Thermoplastic Filament Winding
     热塑性树脂基体纤维缠绕工艺
短句来源
     The Comparison of CVD and SVCD
     CVD与SVCD标准比较
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     What is the "Current Filament"?
     什么是“电流细丝”现象?
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Vacuum evaporating device which was designed by us is used to grow dia-mond films on the substrate of silicon single crystals from a mixture of CH_4 and H_2 gasesat lower pressure by hot-filament CVD method.The results of X-ray diffraction,Ramanspectrum and SEM analysis show that the films present polycrystalline diamond strueture,the process of the films growth is stable and the repeatability of results is excellent.Mecha-nism of growth of diamond films are also investigated.

在低压下,以甲烷和氢的混和气为原料,应用热丝 CVD 法,在 Si 基片上生长出了金刚石薄膜。经 X 射线衍射、激光刺曼光谱和扫描电子显微镜分析,生长产物呈多晶金刚石结构。探讨了金刚石薄膜的生长机理。

In the process of deposition of diamond film on the monocrystalline silicon plate by the hot-filament CVD method, diamond microcrystallines will grow preferably along the defects on the surface of silicon matrix and the density of micro crystallines is much greater than those on the untreated smooth surface. The micro cry stallines SiC was detected in the in- terface between diamond film and silicon substrate by micro electron probe, HUTEM and elec- tron diffraction. It is proposed that, in...

In the process of deposition of diamond film on the monocrystalline silicon plate by the hot-filament CVD method, diamond microcrystallines will grow preferably along the defects on the surface of silicon matrix and the density of micro crystallines is much greater than those on the untreated smooth surface. The micro cry stallines SiC was detected in the in- terface between diamond film and silicon substrate by micro electron probe, HUTEM and elec- tron diffraction. It is proposed that, in CVD, nucleation of diamond microcrystallines depends on the possibility of chemical bond formation bewteen carbon and silicon substrate materials.

运用热丝CVD技术在单晶硅片上沉积金刚石膜,金刚石微晶将优先在基片表面缺陷处生长。经研磨粗糙的硅基材表面上金刚石的晶粒密度,要比未经任何处理的光滑硅表面上的大得多。利用扫描电镜、电镜能谱、超高压透射电镜、电子衍射等分析技术检测样品,在金刚石膜/硅界面处检测到了微晶碳化硅。本文认为,CVD金刚石在硅基材上的成核,取决于金刚石与硅基片材料间形成化学键的难度,能成键才能成核。

The diamond films are prepared by hot-filament CVD. The feedstock is gaseous butane(C_4H_(10)) and the characteristics of the diamond film are analyzed by its Raman spectrum, scanning electron microscopy and X-ray diffraction spectroscopy. The results show that the quality of these films are related to the tempera- ture of filament and substrate, the proportion of butane to hydrogen and the reactor pressure. Nucleation is affected by the disposition of the surface on the substrate. The...

The diamond films are prepared by hot-filament CVD. The feedstock is gaseous butane(C_4H_(10)) and the characteristics of the diamond film are analyzed by its Raman spectrum, scanning electron microscopy and X-ray diffraction spectroscopy. The results show that the quality of these films are related to the tempera- ture of filament and substrate, the proportion of butane to hydrogen and the reactor pressure. Nucleation is affected by the disposition of the surface on the substrate. The mechanism of the growth of the diamond film is tried to be interpreted by the crystal growth and phase transform theories.

金刚石薄膜的制备与热丝温度、衬底温度、工作室压强及反应气体浓度有关,氢原子具有抑制石墨生长的作用,衬底的表面处理对金刚石薄膜的生长有很大影响。本文还试图用晶体生长和相变理论解释金刚石薄膜的生长过程。

 
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