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silicon micromachining technique
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  硅微机械加工技术
     This article introduced two main microfabrication techniques of Micro Opto Electro Mechanical Systems (MOEMS). They are silicon micromachining technique and LIGA technique. Applications of MOEMS in the field of information and communication, automotive industry, biology and medicine, spaceflight and aviation, defense and military were also introduced.
     本文简要介绍了微光机电系统 (MOEMS)中的微加工技术 ,主要是硅微机械加工技术和LIGA技术 ,并介绍了微光机电系统在信息与通讯、汽车工业、生物医学、航空航天、国防军事等领域的应用
短句来源
     Optimized structure of two-leg supported microbridge for microbolometer is designed, with a surface area of 80 μm×80 μm, a leg length of 220 μm and a leg width of 8 μm. With bulk silicon micromachining technique, an 8×1 linerar mircobolometer array based on poly-Si 0.7Ge 0.3 resistor as thermosensitive element is fabricated.
     将多晶锗硅薄膜电阻作为微测辐射热计的敏感元件 ,采用体硅微机械加工技术制作了 8× 1桥式微测辐射热计线性阵列 ,优化设计的微桥由两臂支撑 ,支撑臂的长和宽分别为 2 2 0 μm和 8μm,桥面面积为 80μm× 80μm。
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  “silicon micromachining technique”译为未确定词的双语例句
     Microelectronics Mechanical System And Silicon Micromachining Technique
     微电子机械系统及硅微机械加工工艺
短句来源
     Silicon Micromachining technique has developed into the main MEMS producing technology with the development of integrate circuit technique.
     硅微机械加工工艺是近年来随着集成电路工艺发展起来的MEMS主流技术。
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  相似匹配句对
     The Application of Hydrarine in Silicon Micromachining
     肼在硅微机械加工中的应用
短句来源
     MICROMACHINING OF SILICON BASED SENSORS
     硅基传感器的微机械加工
短句来源
     Microelectronics Mechanical System And Silicon Micromachining Technique
     微电子机械系统及硅微机械加工工艺
短句来源
     The attenuator was successfully fabricated by silicon micromachining techniques.
     采用硅微细加工技术成功地制作出了这种光衰减器 ,并对微驱动器的性能进行了理论分析。
短句来源
     Convex Corner Compensation Techniques in Silicon Micromachining Technology
     硅微机械加工的削角补偿技术
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  silicon micromachining technique
Single crystalline silicon was successfully micromachined using an SDB-SOI structure wafer by means of a porous silicon micromachining technique.
      
In addition, a porous silicon micromachining technique was applied to control the air-gap between the structures and the substrate.
      


Based on the quantitative electroreduction of carbon dioxide at the Pt microelec-trode surface that is in contact with the non-aqueous electrolyte (DMSO), a microelec-trochemical amperometric method for the direct detection of electro-inactive gas CO2 at room temperature was presented. The satisfactory CO2 gas-sensing characteristics, such as good linearity of the calibration curve over the entire CO2 concentration range, 90% response time of 25-30 s, detection limits of 0. 4-0. 5% CO2 in N2, and relatively...

Based on the quantitative electroreduction of carbon dioxide at the Pt microelec-trode surface that is in contact with the non-aqueous electrolyte (DMSO), a microelec-trochemical amperometric method for the direct detection of electro-inactive gas CO2 at room temperature was presented. The satisfactory CO2 gas-sensing characteristics, such as good linearity of the calibration curve over the entire CO2 concentration range, 90% response time of 25-30 s, detection limits of 0. 4-0. 5% CO2 in N2, and relatively high sensitivity, were obtained using a gas-sensing microelectrode and a thin-film microelectrode device, respectively. For comparison, the microfabricated silicon integrated thin-film microelectrode devices exhibited all the advantages of microelectrodes in the field of electroanalysis, and furthermore, silicon micromachining techniques provided a geometrically well-defined, highly uniform thin-film microelectrode, at which current response was excellent in stability and re-producibility.

基于非电活性气体CO_2在‘二甲亚砜/铂微电极’体系中定量的电还原反应,提出微电流法常温直接检测二氧化碳.在常规气敏微电极和硅一体化薄膜微电极器件上获得了满意的气敏响应特性:好的线性响应关系、灵敏度和响应速度.用硅微机械加工技术批量构制的薄膜微电极器件,既保持了微电极的全部优点,又实现了微电流器件结构的一体化,电流响应异常稳定和重现.

A silicon integrated thin-film microelectrode device was developed by using silicon micromachining techniques. This study has shown experimentally that such electrochemical micro-devices exhibited all the advantages which microelectrodes offered in the fieldof electroanalysis,and the CO2 microsensor showed good response characteristics for direct amperometric determination of the CO2 concentration in the gas phase. Furthermore, thinfilm metallization and microlithographic techniques provided...

A silicon integrated thin-film microelectrode device was developed by using silicon micromachining techniques. This study has shown experimentally that such electrochemical micro-devices exhibited all the advantages which microelectrodes offered in the fieldof electroanalysis,and the CO2 microsensor showed good response characteristics for direct amperometric determination of the CO2 concentration in the gas phase. Furthermore, thinfilm metallization and microlithographic techniques provided the high degree of reproducibility required for the electrode surface of amperometric electrochemical device. These devices were not only excellent in characteristics but also low in cost as a result of batch fabrication, and demonstrated the potential to become miniaturized and multifunctional device.The long-term stability was affected by electrochemical crosstalk between the electrodes under long-term operating conditions. It might be envisaged that several special considerationsare important when designing the device configuration.

提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件.这类微电化学器件具有微电极所特有的全部优点,而且由于结构上的一体化,便于器件整体的微型化和集成化.试用薄膜微电极器件电流法常温直接检测CO2气体,取得了满意的结果。设想通过器件三维构型设计的改进和完善,器件工作的长期稳定性可望进一步提高.

The silicon micromachining techniques as a means of mass fabricating microelectrochemical amperometric gas sensor devices on silicon substrate were explored, and the key micromechanical processing techniques compatible with each other were presented. A body-integrated microamperometric sensor device was built up in a silicon integrated electrochemical microcell, The device's performance for direct microamperometric determination of CO2 concentration inthe gas phase was evaluated and compared...

The silicon micromachining techniques as a means of mass fabricating microelectrochemical amperometric gas sensor devices on silicon substrate were explored, and the key micromechanical processing techniques compatible with each other were presented. A body-integrated microamperometric sensor device was built up in a silicon integrated electrochemical microcell, The device's performance for direct microamperometric determination of CO2 concentration inthe gas phase was evaluated and compared to that of conventional amperometric gas sensor devices. Such new devices with specific silicon microstructures are not only excellent in characteristics but also low in cost as a result of batch fabrication. There is tremendous potential for further growth.

探索研究了用于构制以硅为基体材料、具有特定三维微结构的微电流型电化学气体传感器的微加工工艺,提出了双面光刻、高硼掺杂腐蚀止停、化学各向异性刻蚀和硅表面多层膜剥离成形等既实用而又相容的硅微机械加工关键技术。如此构制的微电流型电化学气体传感器,在器件结构、检测灵敏度、电流响应的稳定重现性等方面,与用传统工艺制成的常规电流型气体传感器相比,具有独特的优点。

 
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