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类金刚石膜的
相关语句
  diamond like carbon films
     Deformation Behavior and Finite Element Modeling of Diamond Like Carbon Films under Different Loading Modes
     不同加载方式下类金刚石膜的变形行为及数值模拟研究
短句来源
     Dependence of deposition rate, residual stress and D C electrical resistivity on deposition process were investigated. Diamond like carbon films are amorphous carbon films containing sp 2 and sp 3 bonding.
     结果表明:类金刚石膜是由sp2和sp3键组成的非晶态碳膜,当负偏压高于300V时,膜中sp3/sp2键的比值随负偏压的升高而降低。 类金刚石膜的沉积速率与负偏压Vb成正比。
短句来源
  “类金刚石膜的”译为未确定词的双语例句
     Studies of Diamond-like Carbon Films Deposited on Copper Substrate With Ti/TiC and Si/Si_xN_y Intermediate Layers
     通过制备Ti/TiC和Si/Si_xN_y过渡层在铜基体上沉积类金刚石膜的研究
短句来源
     Surface Characteristics and Corrosion Behavior of DLC Film on NiTi Alloys
     NiTi合金表面类金刚石膜的表面特征和腐蚀行为
短句来源
     Optical Properties of a-C and a-C∶H Diamond-like Films Prepared by High Power Excimer Laser Ablation
     大功率激光制备a-C和a-C∶H类金刚石膜的光学性能研究
短句来源
     Structure,performance,forming mechanism and preparation method of diamond-like carbon film by plasma are discussed,the application prospect of the film in printing and packaging industry is introduced,some suggestions on the application are given with the research and measurement.
     阐述类金刚石膜的结构、性能、形成机制,特别讨论了等离子体技术制备类金刚石膜的各种方法,以及类金钢石膜在印刷机制造和产品包装领域的应用前景,还结合相关的类金刚石膜制备研究与性能测量,就在印刷包装方面的实际应用提出了进一步需要解决的问题。
短句来源
     Fluorinated diamond-like carbon (FDLC) films were prepared by means of plasma source ion implantation (PSII) and micro-wave ECR plasma enhanced chemical vapor deposition (ECR-PECVD) with source gases of CHF3, CH4/CHF3 and C2H2/CHF3. FDLC films are compared with DLC film in construct and various properties. The paper discussed the influence of different technique parameters on FDLC films.
     本文尝试了以CHF_3、CH_4/CHF_3和C_2H_2/CHF_3为源气体,利用微波ECR等离子体源离子注入技术和等离子增强化学气相沉积技术来制备氟化类金刚石膜的方法,并对DLC薄膜和FDLC薄膜的结构和性能进行了分析和比较。
短句来源
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  相似匹配句对
     Fabrication and Applications of Diamond-like Carbon Films
     金刚石膜的制备及应用
短句来源
     Diamond-like carbon film and its applications and preparation
     金刚石膜的应用及制备
短句来源
     Physical Properties and Applications of Diamond-like Carbon Films
     金刚石膜的物理特性及应用
短句来源
     Preparation, Properties and Applications of Diamond-Like Carbon Films
     金刚石膜的制备、性能和应用
短句来源
     PREPARATION OF DIAMONDLIKE FILMS AND THEIR CHARACTERISTICS
     金刚石膜的制备及其物理性质
短句来源
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  diamond like carbon films
Diamond like carbon films and C-N films were prepared using ion beam assisted deposition technique (IBAD).
      
Diamond like carbon films deposited in CHF4 +NF4 (with and without NFF3) have a lower refractive index, a lower bulk resistivity, and a lower optical bandgap than films deposited using CHF4 due to a lower hydrogen content in the films.
      


The Diamond-Like Carbon (DLC) film, prepared with hydrocarbon gases decomposed by RF-plasma has the properties of high hardness, chemical inertness and IR transparence etc. In this paper, we study the properties of infrared, mechanical, structure and electricity of the DLC film. The spectral properties of coated element which being used in the infrared devices are presented, and the forming mechanism of the DIC film in low temperture and pressure is discussed.

利用射频等离子分裂碳氢气体制备的类金刚石膜,具有硬度高、耐蚀和良好的透红外光等特性.本文研究了类金刚石膜的红外、机械、结构及电学特性,给出该膜应用于红外装置中镀膜元件的光谱性能.并结合文中所用的制备方法,讨论了类金刚石膜在低温低压下的形成机制.

The IR high efficiency All-coating with fluoride outlayer is soft, easily moistened and oxidated. This paper proposes a method of using Diamond-Like Carbon (DLC) filn as a protecting coating for high efficiency AR-coating and discusses the change of characteristics of AR-coating after being coated with a DLC film.

外层为氟化物的红外高效膜、膜层软、易吸潮和氧化.本文提出使用类金刚石膜做红外高效膜的保护膜,讨论了镀制类金刚石膜后,镀膜件光谱特性的变化情况.

Diamond-like carbon (DLC) films, prepared by RF plasma CVD, were implanted at a dose of 5×10~(15)Ar/cm~2 with various ion energy of 50, 100, 140, 180 keV. Before and after ion implantation, IR absorption spectra, Raman spectra, optical gap E_(0pt), hydrogen contents and resistivities were measured. The results show that C-H bonds are destroyed and sp~2 and sp~3 components are decreased during implantation. While the ratio of (sp~2/sp~3) increases with ion energy. The EoPt, resistivities and hydrogen contents...

Diamond-like carbon (DLC) films, prepared by RF plasma CVD, were implanted at a dose of 5×10~(15)Ar/cm~2 with various ion energy of 50, 100, 140, 180 keV. Before and after ion implantation, IR absorption spectra, Raman spectra, optical gap E_(0pt), hydrogen contents and resistivities were measured. The results show that C-H bonds are destroyed and sp~2 and sp~3 components are decreased during implantation. While the ratio of (sp~2/sp~3) increases with ion energy. The EoPt, resistivities and hydrogen contents decrease with ion energy increasing. Ho-wever, at 180 keV, the above parameters have no evident change. These results are also discussed in this paper.

本文对等离子体气相沉积法制备的类金刚石膜(a-C:H)进行了离子注入研究。注入剂量固定为5×10~5Ar/cm~2,注入能量分别为50,100,140和180keV。离子注入前后分别作了红外吸收谱,Raman谱,光学能隙,氢含量和电阻率的测量。结果表明,注入离子破坏了膜中的C—H键,sp~2和sp~3态都减少,而(sp~2/sp~3)比值增大;光学能隙E_(opt),电阻率以及氢含量随着注入离子能量的增加而减少,而在180keV时,不再有明显变化。文中对上述结果进行了分析和讨论。

 
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